language: en

[Confidential: not for distribution. Submitted to IOP Publishing for peer review]

12 November 2009

Contrasting characteristics of sub-microsecond pulsed atmospheric air and atmospheric pressure heliumoxygen glow discharges

J. L. Walsh 1 , D. X. Liu 1, 2 , F. Iza 1 , M. Z. Rong 2 , and M. G. Kong 1 *
1 Dept of Electronic and Electrical Engineering, Loughborough University,
Leics LE11 3TU, UK
2 State Key Lab of Electrical Insulation and Power Equipments, Xi'an Jiaotong University,
710049, P. R. China

Abstract: Glow discharges in air are often considered to be the ultimate low-temperature atmospheric pressure plasmas for numerous chamber-free applications. This is due to the ubiquitous presence of air and the perceived abundance of reactive oxygen and nitrogen species in air plasmas. In this paper, sub-microsecond pulsed atmospheric air plasmas are shown to produce a low concentration of excited oxygen atoms but an abundance of excited nitrogen species, UV photons and ozone molecules. This contrasts sharply with efficient production of excited oxygen atoms in comparable helium-oxygen discharges. Relevant reaction chemistry analyzed with a global model suggests that collisional excitation of O 2 by helium metastables is significantly more efficient than electron dissociative excitation of O 2 , electron excitation of O, and ion-ion recombination. These results suggest different practical uses of the two oxygen-containing atmospheric discharges, with air plasmas being well suited for nitrogen and UV based chemistry and He-O 2 plasmas for excited atomic oxygen based chemistry.

[* Author to whom correspondence should be addressed;]

e-mail: m.g.kong@lboro.ac.uk